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#	Keyword	Results	Change	Check Date
5	mems medical sensors	1 930 000	0	2014-06-24
7	mems manufacturing	2 710 000	1	2014-10-23
10	mems development	5 660 000	23	2014-01-09
11	battery-less sensors	4 050 000	-9	2014-09-29
15	wireless batteryless	55 600	0	2014-06-10
16	mems foundry	107 000	0	2014-10-02
20	mass flow sensor	2 710 000	29	2014-07-28
20	wafer processing	10 100 000	2	2013-11-03
21	batteryless	235 000	0	2014-03-28
21	mems assembl7	971 000	7	2013-10-20
22	coriolis mass flow	153 000	-7	2014-01-10
22	Coriolis Mass	403 000	0	2014-09-11
22	Mass Coriolis	481 000	9	2014-09-30
22	mems technology	2 810 000	-2	2014-08-31
23	chip level	30 000 000	0	2014-06-05
26	mems manufacturer	424 000	0	2014-05-30
28	etch thermal oxide	5 190 000	-8	2013-10-23
29	fc10	1 340 000	-21	2013-10-23
31	najfi .org	2 190 000	0	2014-04-16
33	a fuel quality sensor	2 040 000	-30	2015-03-28
34	mems sensor	2 580 000	6	2014-08-22
35	taxi meter design microchip	97 000	0	2014-08-27
37	wafer plot download	7 270 000	0	2014-06-21
38	density meter	3 130 000	-25	2014-04-13
39	mems assembly	1 480 000	0	2014-07-06
40	mass flowmeters	323 000	7	2014-10-10
40	mems fabrication	2 060 000	-23	2014-01-03
41	vet rcon change vent name	7 290 000	-13	2014-07-28
42	medical mass flow sensor	343 000	-23	2014-08-18
42	pass design pdf	263 000 000	0	2014-04-21